Wet and dry etching techniques for the release of sub-micrometre perforated membranes

S. Kuiper, Meint J. de Boer, C.J.M. van Rijn, W. Nijdam, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

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1999

Wet and dry etching techniques for the release of submicron perforated membranes
Kuiper, S., de Boer, M. J., van Rijn, C. J. M., Nijdam, W., Krijnen, G. J. M. & Elwenspoek, M. C., 12 Sept 1999, The 10th Micromechanics Europe Workshop, MME '99: September 27-28, 1999, Gif sur Yvette, France : proceedings. Orsay: Université Paris-sud, Institut d'Électronique Fondamentale, p. 168-171
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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