Wet and dry etching techniques for the release of sub-micron perforated membranes

S. Kuiper, C.J.M. van Rijn, W. Nijdam, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Keywords

@misc{c3e04360f5a84f24a372b3a051d9f66c,

title = "Wet and dry etching techniques for the release of sub-micron perforated membranes",

keywords = "METIS-114822",

author = "S. Kuiper and {van Rijn}, C.J.M. and W. Nijdam and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

year = "2000",

month = jun,

day = "26",

language = "Undefined",

type = "Other",

}