Wet and dry etching techniques for the release of sub-micron perforated membranes

Research output: Other contribution › Other research output

Keywords

@misc{c3e04360f5a84f24a372b3a051d9f66c,

title = "Wet and dry etching techniques for the release of sub-micron perforated membranes",

keywords = "METIS-114822",

author = "S. Kuiper and \{van Rijn\}, C.J.M. and W. Nijdam and Krijnen, \{Gijsbertus J.M.\} and Elwenspoek, \{Michael Curt\}",

year = "2000",

month = jun,

day = "26",

language = "Undefined",

type = "Other",

}