Wet and dry etching techniques for the release of submicron perforated membranes

S. Kuiper, Meint J. de Boer, C.J.M. van Rijn, W. Nijdam, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    Original languageEnglish
    Title of host publicationThe 10th Micromechanics Europe Workshop, MME '99
    Subtitle of host publicationSeptember 27-28, 1999, Gif sur Yvette, France : proceedings
    Place of PublicationOrsay
    PublisherUniversité Paris-sud, Institut d'Électronique Fondamentale
    Pages168-171
    Publication statusPublished - 12 Sep 1999
    Event10th Micromechanics Europe Workshop, MME 1999 - Gif-sur-Yvette, France
    Duration: 27 Sep 199928 Sep 1999
    Conference number: 10

    Workshop

    Workshop10th Micromechanics Europe Workshop, MME 1999
    Abbreviated titleMME
    CountryFrance
    CityGif-sur-Yvette
    Period27/09/9928/09/99

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