Wet and dry etching techniques for the release of submicron perforated membranes

S. Kuiper; Meint J. de Boer; C.J.M. van Rijn; W. Nijdam; Gijsbertus J.M. Krijnen; Michael Curt Elwenspoek

Wet and dry etching techniques for the release of submicron perforated membranes

S. Kuiper, Meint J. de Boer, C.J.M. van Rijn, W. Nijdam, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	The 10th Micromechanics Europe Workshop, MME '99
Subtitle of host publication	September 27-28, 1999, Gif sur Yvette, France : proceedings
Place of Publication	Orsay
Publisher	Université Paris-sud, Institut d'Électronique Fondamentale
Pages	168-171
Publication status	Published - 12 Sep 1999
Event	10th Micromechanics Europe Workshop, MME 1999 - Gif-sur-Yvette, France Duration: 27 Sep 1999 → 28 Sep 1999 Conference number: 10

Workshop

Workshop	10th Micromechanics Europe Workshop, MME 1999
Abbreviated title	MME
Country/Territory	France
City	Gif-sur-Yvette
Period	27/09/99 → 28/09/99

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Wet and dry etching techniques for the release of sub-micrometre perforated membranes
Kuiper, S., de Boer, M. J., van Rijn, C. J. M., Nijdam, W., Krijnen, G. J. M. & Elwenspoek, M. C., Jun 2000, In: Journal of micromechanics and microengineering. 10, 10, p. 171-174 4 p.
Research output: Contribution to journal › Article › Academic › peer-review

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Kuiper, S., de Boer, M. J., van Rijn, C. J. M., Nijdam, W., Krijnen, G. J. M., & Elwenspoek, M. C. (1999). Wet and dry etching techniques for the release of submicron perforated membranes. In The 10th Micromechanics Europe Workshop, MME '99: September 27-28, 1999, Gif sur Yvette, France : proceedings (pp. 168-171). Université Paris-sud, Institut d'Électronique Fondamentale.

@inproceedings{be074003a7174ae3b1e911081034fdf5,

title = "Wet and dry etching techniques for the release of submicron perforated membranes",

author = "S. Kuiper and {de Boer}, {Meint J.} and {van Rijn}, C.J.M. and W. Nijdam and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

year = "1999",

month = sep,

day = "12",

language = "English",

pages = "168--171",

booktitle = "The 10th Micromechanics Europe Workshop, MME '99",

publisher = "Universit{\'e} Paris-sud, Institut d'{\'E}lectronique Fondamentale",

note = "10th Micromechanics Europe Workshop, MME 1999, MME ; Conference date: 27-09-1999 Through 28-09-1999",

}

Kuiper, S, de Boer, MJ, van Rijn, CJM, Nijdam, W, Krijnen, GJM & Elwenspoek, MC 1999, Wet and dry etching techniques for the release of submicron perforated membranes. in The 10th Micromechanics Europe Workshop, MME '99: September 27-28, 1999, Gif sur Yvette, France : proceedings. Université Paris-sud, Institut d'Électronique Fondamentale, Orsay, pp. 168-171, 10th Micromechanics Europe Workshop, MME 1999, Gif-sur-Yvette, France, 27/09/99.

Wet and dry etching techniques for the release of submicron perforated membranes. / Kuiper, S.; de Boer, Meint J.; van Rijn, C.J.M. et al.

The 10th Micromechanics Europe Workshop, MME '99: September 27-28, 1999, Gif sur Yvette, France : proceedings. Orsay : Université Paris-sud, Institut d'Électronique Fondamentale, 1999. p. 168-171.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Wet and dry etching techniques for the release of submicron perforated membranes

AU - Kuiper, S.

AU - de Boer, Meint J.

AU - van Rijn, C.J.M.

AU - Nijdam, W.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 10

PY - 1999/9/12

Y1 - 1999/9/12

M3 - Conference contribution

SP - 168

EP - 171

BT - The 10th Micromechanics Europe Workshop, MME '99

PB - Université Paris-sud, Institut d'Électronique Fondamentale

CY - Orsay

T2 - 10th Micromechanics Europe Workshop, MME 1999

Y2 - 27 September 1999 through 28 September 1999

ER -

Wet and dry etching techniques for the release of submicron perforated membranes

Workshop

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Research output

Wet and dry etching techniques for the release of sub-micrometre perforated membranes

Cite this