Wet and dry etching techniques for the release of submicron perforated membranes

S. Kuiper, Meint J. de Boer, C.J.M. van Rijn, W. Nijdam, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    Original languageEnglish
    Title of host publicationThe 10th Micromechanics Europe Workshop, MME '99
    Subtitle of host publicationSeptember 27-28, 1999, Gif sur Yvette, France : proceedings
    Place of PublicationOrsay
    PublisherUniversité Paris-sud, Institut d'Électronique Fondamentale
    Pages168-171
    Publication statusPublished - 12 Sept 1999
    Event10th Micromechanics Europe Workshop, MME 1999 - Gif-sur-Yvette, France
    Duration: 27 Sept 199928 Sept 1999
    Conference number: 10

    Workshop

    Workshop10th Micromechanics Europe Workshop, MME 1999
    Abbreviated titleMME
    Country/TerritoryFrance
    CityGif-sur-Yvette
    Period27/09/9928/09/99

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