Wet and dry etching techniques for the release of submicron perforated membranes

S. Kuiper, Meint J. de Boer, C.J.M. van Rijn, W. Nijdam, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

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Wet and dry etching techniques for the release of sub-micrometre perforated membranes
Kuiper, S., de Boer, M. J., van Rijn, C. J. M., Nijdam, W., Krijnen, G. J. M. & Elwenspoek, M. C., Jun 2000, In: Journal of micromechanics and microengineering. 10, 10, p. 171-174 4 p.
Research output: Contribution to journal › Article › Academic › peer-review

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