Wet anisotropic etching for fluidic 1D nanochannels

J. Haneveld, Henricus V. Jansen, Johan W. Berenschot, Niels Roelof Tas, Michael Curt Elwenspoek

    Research output: Contribution to conferencePoster

    84 Citations (Scopus)
    Original languageUndefined
    Pages-
    Publication statusPublished - 2 Oct 2003
    EventMESA+ Day 2003 - University of Twente, Enschede, Netherlands
    Duration: 2 Oct 20032 Oct 2003

    Conference

    ConferenceMESA+ Day 2003
    CountryNetherlands
    CityEnschede
    Period2/10/032/10/03
    Other(MESA+ Meeting/Dag)

    Keywords

    • METIS-216936

    Cite this

    Haneveld, J., Jansen, H. V., Berenschot, J. W., Tas, N. R., & Elwenspoek, M. C. (2003). Wet anisotropic etching for fluidic 1D nanochannels. -. Poster session presented at MESA+ Day 2003, Enschede, Netherlands.