Wet anisotropic etching for fluidic 1D nanochannels

J. Haneveld, Henricus V. Jansen, Johan W. Berenschot, Niels Roelof Tas, Michael Curt Elwenspoek

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 2 Oct 2003
Event	MESA+ Day 2003 - University of Twente, Enschede, Netherlands Duration: 2 Oct 2003 → 2 Oct 2003

Keywords

@conference{36acbfbef56e4bca90a4539163194f00,

title = "Wet anisotropic etching for fluidic 1D nanochannels",

keywords = "METIS-216936",

author = "J. Haneveld and Jansen, {Henricus V.} and Berenschot, {Johan W.} and Tas, {Niels Roelof} and Elwenspoek, {Michael Curt}",

year = "2003",

month = oct,

day = "2",

language = "Undefined",

pages = "--",

note = "MESA+ Day 2003 ; Conference date: 02-10-2003 Through 02-10-2003",

}