X-ray diffraction for analysis of doping and damage profiles in silicon

J.G.E. Klappe

Research output: Book/Report › Report › Professional

Keywords

@book{72dd7a6a85994bc880f652fc57c717ee,

title = "X-ray diffraction for analysis of doping and damage profiles in silicon",

keywords = "METIS-117168",

author = "J.G.E. Klappe",

note = "Eindverslag Ontwerpersopleiding ",

year = "1991",

month = apr,

day = "1",

language = "Undefined",

publisher = "University of Twente",

address = "Netherlands",

}