X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution

D. A. Grishina; C. A.M. Harteveld; A. Pacureanu; D. Devashish; A. Lagendijk; P. Cloetens; W. L. Vos

doi:10.1109/CLEOE-EQEC.2019.8872532

X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution

D. A. Grishina, C. A.M. Harteveld, A. Pacureanu, D. Devashish, A. Lagendijk, P. Cloetens, W. L. Vos

Complex Photonic Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

Three-dimensional (3D) nanostructures are drawing a fast-growing attention for their advanced functionalities in nanophotonics [1], photovoltaics, and novel 3D integrated circuits and flash memories. The functionalities of such nanostructures are fundamentally determined by their complex internal structure. Inevitably, any fabricated nanostructure differs from its initial design. Hence, the observed functionality differs from the expected one. It is thus critical to assess the structure of a 3D nanomaterial and verify how well it matches the design. Ideally such an inspection technique leaves no traces of the inspection in order to leave the nanostructure fully functional and ready for integration. Here, we introduce traceless X-ray tomography (TXT) as a new methodology in nanotechnology to non-destructively assess the functionality of nanostructures.

Original language	English
Title of host publication	2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
Publisher	IEEE
ISBN (Electronic)	9781728104690
DOIs	https://doi.org/10.1109/CLEOE-EQEC.2019.8872532
Publication status	Published - Jun 2019
Event	Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 - Munich Trade Fair Centre, Munich, Germany Duration: 23 Jun 2019 → 27 Jun 2019 http://www.cleoeurope.org

Conference

Conference	Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
Abbreviated title	CLEO/Europe-EQEC 2019
Country/Territory	Germany
City	Munich
Period	23/06/19 → 27/06/19
Internet address	http://www.cleoeurope.org

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This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1109/CLEOE-EQEC.2019.8872532

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Grishina, D. A., Harteveld, C. A. M., Pacureanu, A., Devashish, D., Lagendijk, A., Cloetens, P., & Vos, W. L. (2019). X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution. In 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 Article 8872532 IEEE. https://doi.org/10.1109/CLEOE-EQEC.2019.8872532

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title = "X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution",

abstract = "Three-dimensional (3D) nanostructures are drawing a fast-growing attention for their advanced functionalities in nanophotonics [1], photovoltaics, and novel 3D integrated circuits and flash memories. The functionalities of such nanostructures are fundamentally determined by their complex internal structure. Inevitably, any fabricated nanostructure differs from its initial design. Hence, the observed functionality differs from the expected one. It is thus critical to assess the structure of a 3D nanomaterial and verify how well it matches the design. Ideally such an inspection technique leaves no traces of the inspection in order to leave the nanostructure fully functional and ready for integration. Here, we introduce traceless X-ray tomography (TXT) as a new methodology in nanotechnology to non-destructively assess the functionality of nanostructures.",

author = "Grishina, {D. A.} and Harteveld, {C. A.M.} and A. Pacureanu and D. Devashish and A. Lagendijk and P. Cloetens and Vos, {W. L.}",

year = "2019",

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doi = "10.1109/CLEOE-EQEC.2019.8872532",

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booktitle = "2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019",

publisher = "IEEE",

address = "United States",

note = "Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, CLEO/Europe-EQEC 2019, CLEO/Europe-EQEC 2019 ; Conference date: 23-06-2019 Through 27-06-2019",

url = "http://www.cleoeurope.org",

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Grishina, DA, Harteveld, CAM, Pacureanu, A, Devashish, D , Lagendijk, A, Cloetens, P & Vos, WL 2019, X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution. in 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019., 8872532, IEEE, Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, CLEO/Europe-EQEC 2019, Munich, Bavaria, Germany, 23/06/19. https://doi.org/10.1109/CLEOE-EQEC.2019.8872532

X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution. / Grishina, D. A.; Harteveld, C. A.M.; Pacureanu, A. et al.
2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019. IEEE, 2019. 8872532.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution

AU - Grishina, D. A.

AU - Harteveld, C. A.M.

AU - Pacureanu, A.

AU - Devashish, D.

AU - Lagendijk, A.

AU - Cloetens, P.

AU - Vos, W. L.

PY - 2019/6

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N2 - Three-dimensional (3D) nanostructures are drawing a fast-growing attention for their advanced functionalities in nanophotonics [1], photovoltaics, and novel 3D integrated circuits and flash memories. The functionalities of such nanostructures are fundamentally determined by their complex internal structure. Inevitably, any fabricated nanostructure differs from its initial design. Hence, the observed functionality differs from the expected one. It is thus critical to assess the structure of a 3D nanomaterial and verify how well it matches the design. Ideally such an inspection technique leaves no traces of the inspection in order to leave the nanostructure fully functional and ready for integration. Here, we introduce traceless X-ray tomography (TXT) as a new methodology in nanotechnology to non-destructively assess the functionality of nanostructures.

AB - Three-dimensional (3D) nanostructures are drawing a fast-growing attention for their advanced functionalities in nanophotonics [1], photovoltaics, and novel 3D integrated circuits and flash memories. The functionalities of such nanostructures are fundamentally determined by their complex internal structure. Inevitably, any fabricated nanostructure differs from its initial design. Hence, the observed functionality differs from the expected one. It is thus critical to assess the structure of a 3D nanomaterial and verify how well it matches the design. Ideally such an inspection technique leaves no traces of the inspection in order to leave the nanostructure fully functional and ready for integration. Here, we introduce traceless X-ray tomography (TXT) as a new methodology in nanotechnology to non-destructively assess the functionality of nanostructures.

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M3 - Conference contribution

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PB - IEEE

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Y2 - 23 June 2019 through 27 June 2019

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X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution

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