Three-dimensional (3D) nanostructures are drawing a fast-growing attention for their advanced functionalities in nanophotonics , photovoltaics, and novel 3D integrated circuits and flash memories. The functionalities of such nanostructures are fundamentally determined by their complex internal structure. Inevitably, any fabricated nanostructure differs from its initial design. Hence, the observed functionality differs from the expected one. It is thus critical to assess the structure of a 3D nanomaterial and verify how well it matches the design. Ideally such an inspection technique leaves no traces of the inspection in order to leave the nanostructure fully functional and ready for integration. Here, we introduce traceless X-ray tomography (TXT) as a new methodology in nanotechnology to non-destructively assess the functionality of nanostructures.
|Title of host publication||2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019|
|Publication status||Published - Jun 2019|
|Event||Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 - Munich Trade Fair Centre, Munich, Germany|
Duration: 23 Jun 2019 → 27 Jun 2019
|Conference||Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, CLEO/Europe-EQEC 2019|
|Abbreviated title||CLEO/Europe-EQEC 2019|
|Period||23/06/19 → 27/06/19|