X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution

D. A. Grishina, C. A.M. Harteveld, A. Pacureanu, D. Devashish, A. Lagendijk, P. Cloetens, W. L. Vos

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

Three-dimensional (3D) nanostructures are drawing a fast-growing attention for their advanced functionalities in nanophotonics [1], photovoltaics, and novel 3D integrated circuits and flash memories. The functionalities of such nanostructures are fundamentally determined by their complex internal structure. Inevitably, any fabricated nanostructure differs from its initial design. Hence, the observed functionality differs from the expected one. It is thus critical to assess the structure of a 3D nanomaterial and verify how well it matches the design. Ideally such an inspection technique leaves no traces of the inspection in order to leave the nanostructure fully functional and ready for integration. Here, we introduce traceless X-ray tomography (TXT) as a new methodology in nanotechnology to non-destructively assess the functionality of nanostructures.

Original languageEnglish
Title of host publication2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
PublisherIEEE
ISBN (Electronic)9781728104690
DOIs
Publication statusPublished - Jun 2019
EventConference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 - Munich Trade Fair Centre, Munich, Germany
Duration: 23 Jun 201927 Jun 2019
http://www.cleoeurope.org

Conference

ConferenceConference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
Abbreviated titleCLEO/Europe-EQEC 2019
CountryGermany
CityMunich
Period23/06/1927/06/19
Internet address

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    Grishina, D. A., Harteveld, C. A. M., Pacureanu, A., Devashish, D., Lagendijk, A., Cloetens, P., & Vos, W. L. (2019). X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution. In 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 [8872532] IEEE. https://doi.org/10.1109/CLEOE-EQEC.2019.8872532