X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution

D. A. Grishina; C. A.M. Harteveld; A. Pacureanu; D. Devashish; A. Lagendijk; P. Cloetens; W. L. Vos

X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution

D. A. Grishina, C. A.M. Harteveld, A. Pacureanu, D. Devashish, A. Lagendijk, P. Cloetens, W. L. Vos

Complex Photonic Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

Three-dimensional (3D) nanostructures are drawing a fast-growing attention for their advanced functionalities in nanophotonics [1], photovoltaics, and novel 3D integrated circuits and flash memories. The functionalities of such nanostructures are fundamentally determined by their complex internal structure. Inevitably, any fabricated nanostructure differs from its initial design. Hence, the observed functionality differs from the expected one. It is thus critical to assess the structure of a 3D nanomaterial and verify how well it matches the design. Ideally such an inspection technique leaves no traces of the inspection in order to leave the nanostructure fully functional and ready for integration. Here, we introduce traceless X-ray tomography (TXT) as a new methodology in nanotechnology to non-destructively assess the functionality of nanostructures.

Original language	English
Title of host publication	The European Conference on Lasers and Electro-Optics, CLEO_Europe_2019
Publisher	Optical Society of America
ISBN (Electronic)	9781557528209
Publication status	Published - 2019
Event	Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 - Munich Trade Fair Centre, Munich, Germany Duration: 23 Jun 2019 → 27 Jun 2019 http://www.cleoeurope.org

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F140-CLEO_Europe 2019

Conference

Conference	Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
Abbreviated title	CLEO/Europe-EQEC 2019
Country/Territory	Germany
City	Munich
Period	23/06/19 → 27/06/19
Internet address	http://www.cleoeurope.org

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

Grishina, D. A., Harteveld, C. A. M., Pacureanu, A., Devashish, D., Lagendijk, A., Cloetens, P., & Vos, W. L. (2019). X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution. In The European Conference on Lasers and Electro-Optics, CLEO_Europe_2019 Article 2019-ce_6_5 (Optics InfoBase Conference Papers; Vol. Part F140-CLEO_Europe 2019). Optical Society of America.

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title = "X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution",

abstract = "Three-dimensional (3D) nanostructures are drawing a fast-growing attention for their advanced functionalities in nanophotonics [1], photovoltaics, and novel 3D integrated circuits and flash memories. The functionalities of such nanostructures are fundamentally determined by their complex internal structure. Inevitably, any fabricated nanostructure differs from its initial design. Hence, the observed functionality differs from the expected one. It is thus critical to assess the structure of a 3D nanomaterial and verify how well it matches the design. Ideally such an inspection technique leaves no traces of the inspection in order to leave the nanostructure fully functional and ready for integration. Here, we introduce traceless X-ray tomography (TXT) as a new methodology in nanotechnology to non-destructively assess the functionality of nanostructures.",

author = "Grishina, {D. A.} and Harteveld, {C. A.M.} and A. Pacureanu and D. Devashish and A. Lagendijk and P. Cloetens and Vos, {W. L.}",

year = "2019",

language = "English",

series = "Optics InfoBase Conference Papers",

publisher = "Optical Society of America",

booktitle = "The European Conference on Lasers and Electro-Optics, CLEO_Europe_2019",

note = "Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, CLEO/Europe-EQEC 2019, CLEO/Europe-EQEC 2019 ; Conference date: 23-06-2019 Through 27-06-2019",

url = "http://www.cleoeurope.org",

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Grishina, DA, Harteveld, CAM, Pacureanu, A, Devashish, D , Lagendijk, A, Cloetens, P & Vos, WL 2019, X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution. in The European Conference on Lasers and Electro-Optics, CLEO_Europe_2019., 2019-ce_6_5, Optics InfoBase Conference Papers, vol. Part F140-CLEO_Europe 2019, Optical Society of America, Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, CLEO/Europe-EQEC 2019, Munich, Bavaria, Germany, 23/06/19.

X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution. / Grishina, D. A.; Harteveld, C. A.M.; Pacureanu, A. et al.
The European Conference on Lasers and Electro-Optics, CLEO_Europe_2019. Optical Society of America, 2019. 2019-ce_6_5 (Optics InfoBase Conference Papers; Vol. Part F140-CLEO_Europe 2019).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution

AU - Grishina, D. A.

AU - Harteveld, C. A.M.

AU - Pacureanu, A.

AU - Devashish, D.

AU - Lagendijk, A.

AU - Cloetens, P.

AU - Vos, W. L.

PY - 2019

Y1 - 2019

N2 - Three-dimensional (3D) nanostructures are drawing a fast-growing attention for their advanced functionalities in nanophotonics [1], photovoltaics, and novel 3D integrated circuits and flash memories. The functionalities of such nanostructures are fundamentally determined by their complex internal structure. Inevitably, any fabricated nanostructure differs from its initial design. Hence, the observed functionality differs from the expected one. It is thus critical to assess the structure of a 3D nanomaterial and verify how well it matches the design. Ideally such an inspection technique leaves no traces of the inspection in order to leave the nanostructure fully functional and ready for integration. Here, we introduce traceless X-ray tomography (TXT) as a new methodology in nanotechnology to non-destructively assess the functionality of nanostructures.

AB - Three-dimensional (3D) nanostructures are drawing a fast-growing attention for their advanced functionalities in nanophotonics [1], photovoltaics, and novel 3D integrated circuits and flash memories. The functionalities of such nanostructures are fundamentally determined by their complex internal structure. Inevitably, any fabricated nanostructure differs from its initial design. Hence, the observed functionality differs from the expected one. It is thus critical to assess the structure of a 3D nanomaterial and verify how well it matches the design. Ideally such an inspection technique leaves no traces of the inspection in order to leave the nanostructure fully functional and ready for integration. Here, we introduce traceless X-ray tomography (TXT) as a new methodology in nanotechnology to non-destructively assess the functionality of nanostructures.

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M3 - Conference contribution

AN - SCOPUS:85084606177

T3 - Optics InfoBase Conference Papers

BT - The European Conference on Lasers and Electro-Optics, CLEO_Europe_2019

PB - Optical Society of America

T2 - Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, CLEO/Europe-EQEC 2019

Y2 - 23 June 2019 through 27 June 2019

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X-ray imaging of functional three-dimensional photonic nanostructures with 20-nm resolution

Abstract

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