XPS and SPM characterization of ALD grown thin Al2O3 layers

A. Zinine, Jacobus Marinus Sturm, Herbert Wormeester, Bene Poelsema, R.G. Bankras, W.A.M. Aarnink, J. Holleman, Jurriaan Schmitz

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 16 Aug 2004
EventAVS International Conference on Atomic Layer Deposition, ALD 2004 - Helsinki, Finland
Duration: 16 Aug 200418 Aug 2004

Conference

ConferenceAVS International Conference on Atomic Layer Deposition, ALD 2004
CountryFinland
CityHelsinki
Period16/08/0418/08/04

Keywords

  • METIS-221044

Cite this

Zinine, A., Sturm, J. M., Wormeester, H., Poelsema, B., Bankras, R. G., Aarnink, W. A. M., ... Schmitz, J. (2004). XPS and SPM characterization of ALD grown thin Al2O3 layers. -. Poster session presented at AVS International Conference on Atomic Layer Deposition, ALD 2004, Helsinki, Finland.