XPS and SPM characterization of ALD grown thin Al2O3 layers

A. Zinine, Jacobus Marinus Sturm, Herbert Wormeester, Bene Poelsema, R.G. Bankras, W.A.M. Aarnink, J. Holleman, Jurriaan Schmitz

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 16 Aug 2004
EventAVS International Conference on Atomic Layer Deposition, ALD 2004 - Helsinki, Finland
Duration: 16 Aug 200418 Aug 2004

Conference

ConferenceAVS International Conference on Atomic Layer Deposition, ALD 2004
CountryFinland
CityHelsinki
Period16/08/0418/08/04

Keywords

  • METIS-221044

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