XPS and SPM characterization of ALD grown thin Al2O3 layers

A. Zinine; Jacobus Marinus Sturm; Herbert Wormeester; Bene Poelsema; R.G. Bankras; W.A.M. Aarnink; J. Holleman; Jurriaan Schmitz

XPS and SPM characterization of ALD grown thin Al2O3 layers

A. Zinine, Jacobus Marinus Sturm, Herbert Wormeester, Bene Poelsema, R.G. Bankras, W.A.M. Aarnink, J. Holleman, Jurriaan Schmitz

Physics of Interfaces and Nanomaterials

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 16 Aug 2004
Event	AVS International Conference on Atomic Layer Deposition, ALD 2004 - Helsinki, Finland Duration: 16 Aug 2004 → 18 Aug 2004

Conference

Conference	AVS International Conference on Atomic Layer Deposition, ALD 2004
Country/Territory	Finland
City	Helsinki
Period	16/08/04 → 18/08/04

Keywords

METIS-221044

Cite this

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title = "XPS and SPM characterization of ALD grown thin Al2O3 layers",

keywords = "METIS-221044",

author = "A. Zinine and Sturm, {Jacobus Marinus} and Herbert Wormeester and Bene Poelsema and R.G. Bankras and W.A.M. Aarnink and J. Holleman and Jurriaan Schmitz",

year = "2004",

month = aug,

day = "16",

language = "Undefined",

pages = "--",

note = "AVS International Conference on Atomic Layer Deposition, ALD 2004 ; Conference date: 16-08-2004 Through 18-08-2004",

}

TY - CONF

T1 - XPS and SPM characterization of ALD grown thin Al2O3 layers

AU - Zinine, A.

AU - Sturm, Jacobus Marinus

AU - Wormeester, Herbert

AU - Poelsema, Bene

AU - Bankras, R.G.

AU - Aarnink, W.A.M.

AU - Holleman, J.

AU - Schmitz, Jurriaan

PY - 2004/8/16

Y1 - 2004/8/16

KW - METIS-221044

M3 - Poster

SP - -

T2 - AVS International Conference on Atomic Layer Deposition, ALD 2004

Y2 - 16 August 2004 through 18 August 2004

ER -