XPS and SPM characterization of ALD grown thin Al2O3 layers

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 14 Nov 2004
Event51st AVS International Symposium 2004 - Anaheim, United States
Duration: 14 Nov 200419 Nov 2004
Conference number: 51

Conference

Conference51st AVS International Symposium 2004
CountryUnited States
CityAnaheim
Period14/11/0419/11/04

Keywords

  • METIS-221014

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