XPS and SPM characterization of ALD grown thin Al2O3 layers

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 14 Nov 2004
Event	51st AVS International Symposium 2004 - Anaheim, United States Duration: 14 Nov 2004 → 19 Nov 2004 Conference number: 51

Conference	51st AVS International Symposium 2004
Country/Territory	United States
City	Anaheim
Period	14/11/04 → 19/11/04

Keywords

@conference{b9436cfabe3c48e4af1b8dc3e0c0a69b,

title = "XPS and SPM characterization of ALD grown thin Al2O3 layers",

keywords = "METIS-221014",

author = "Sturm, \{Jacobus Marinus\} and A. Zinine and Herbert Wormeester and Bene Poelsema and R.G. Bankras",

year = "2004",

month = nov,

day = "14",

language = "Undefined",

pages = "--",

note = "51st AVS International Symposium 2004 ; Conference date: 14-11-2004 Through 19-11-2004",

}

TY - CONF

T1 - XPS and SPM characterization of ALD grown thin Al2O3 layers

AU - Sturm, Jacobus Marinus

AU - Zinine, A.

AU - Wormeester, Herbert

AU - Poelsema, Bene

AU - Bankras, R.G.

N1 - Conference code: 51

PY - 2004/11/14

Y1 - 2004/11/14

KW - METIS-221014

M3 - Poster

SP - -

T2 - 51st AVS International Symposium 2004

Y2 - 14 November 2004 through 19 November 2004

ER -