XPS and SPM characterization of ALD grown thin Al2O3 layers

A. Zinine; Jacobus Marinus Sturm; Herbert Wormeester; Bene Poelsema; R.G. Bankras; W.A.M. Aarnink; J. Holleman; Jurriaan Schmitz

XPS and SPM characterization of ALD grown thin Al2O3 layers

A. Zinine
, Jacobus Marinus Sturm
, Herbert Wormeester
, Bene Poelsema
, R.G. Bankras
, W.A.M. Aarnink
, J. Holleman
, Jurriaan Schmitz

Physics of Interfaces and Nanomaterials

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 16 Aug 2004
Event	AVS International Conference on Atomic Layer Deposition, ALD 2004 - Helsinki, Finland Duration: 16 Aug 2004 → 18 Aug 2004

Conference

Conference	AVS International Conference on Atomic Layer Deposition, ALD 2004
Country/Territory	Finland
City	Helsinki
Period	16/08/04 → 18/08/04

Keywords

METIS-221044

Cite this

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title = "XPS and SPM characterization of ALD grown thin Al2O3 layers",

keywords = "METIS-221044",

author = "A. Zinine and Sturm, \{Jacobus Marinus\} and Herbert Wormeester and Bene Poelsema and R.G. Bankras and W.A.M. Aarnink and J. Holleman and Jurriaan Schmitz",

year = "2004",

month = aug,

day = "16",

language = "Undefined",

pages = "--",

note = "AVS International Conference on Atomic Layer Deposition, ALD 2004 ; Conference date: 16-08-2004 Through 18-08-2004",

}

TY - CONF

T1 - XPS and SPM characterization of ALD grown thin Al2O3 layers

AU - Zinine, A.

AU - Sturm, Jacobus Marinus

AU - Wormeester, Herbert

AU - Poelsema, Bene

AU - Bankras, R.G.

AU - Aarnink, W.A.M.

AU - Holleman, J.

AU - Schmitz, Jurriaan

PY - 2004/8/16

Y1 - 2004/8/16

KW - METIS-221044

M3 - Poster

SP - -

T2 - AVS International Conference on Atomic Layer Deposition, ALD 2004

Y2 - 16 August 2004 through 18 August 2004

ER -