XRD texture and morphology analysis of polycrystalline LPCVD germanium-silicon

Cora Salm, J.G.E. Klappe, J. Holleman, J.B. Rem, P.H. Woerlee

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    10 Citations (Scopus)
    Original languageUndefined
    Title of host publicationMaterials Research Society symposia proceedings
    Pages721-726
    Publication statusPublished - 22 Nov 1994

    Keywords

    • METIS-113980

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