XRD texture and morphology analysis of polycrystalline LPCVD germanium-silicon

Cora Salm, J.G.E. Klappe, J. Holleman, J.B. Rem, P.H. Woerlee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Materials Research Society symposia proceedings
Pages	721-726
Publication status	Published - 22 Nov 1994

Keywords

@inproceedings{9991720411fe4e9b86696505c89056d8,

title = "XRD texture and morphology analysis of polycrystalline LPCVD germanium-silicon",

keywords = "METIS-113980",

author = "Cora Salm and J.G.E. Klappe and J. Holleman and J.B. Rem and P.H. Woerlee",

year = "1994",

month = nov,

day = "22",

language = "Undefined",

pages = "721--726",

booktitle = "Materials Research Society symposia proceedings",

}