Young's modulus and residual stress of GeSbTe phase-change thin films

Hammad Nazeer, Harish Bhaskaran, Léon A. Woldering, Leon Abelmann*

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)
484 Downloads (Pure)


The mechanical properties of phase change materials alter when the phase is transformed. In this paper, we report on experiments that determine the change in crucial parameters such as Young's modulus and residual stress for two of the most widely employed compositions of phase change films, Ge1Sb2Te4 and Ge2Sb2Te5, using an accurate microcantilever methodology. The results support understanding of the exact mechanisms that account for the phase transition, especially with regard to stress, which leads to drift in non-volatile data storage. Moreover, detailed information on the change in mechanical properties will enable the design of novel low-power nonvolatile MEMS.

Original languageEnglish
Pages (from-to)69-75
Number of pages7
JournalThin solid films
Issue numberPart A
Publication statusPublished - 1 Oct 2015


  • Cantilever resonance
  • GeSbTe
  • Phase change
  • Strain
  • Young's modulus
  • n/a OA procedure


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