Young's modulus and residual stress of GeSbTe phase-change thin films

The mechanical properties of phase change materials alter when the phase is transformed. In this paper, we report on experiments that determine the change in crucial parameters such as Young's modulus and residual stress for two of the most widely employed compositions of phase change films, Ge₁Sb₂Te₄ and Ge₂Sb₂Te₅, using an accurate microcantilever methodology. The results support understanding of the exact mechanisms that account for the phase transition, especially with regard to stress, which leads to drift in non-volatile data storage. Moreover, detailed information on the change in mechanical properties will enable the design of novel low-power nonvolatile MEMS.